Best On-Campus Master's in Artificial Intelligence: 2026 Rankings & Career Guide
On-campus and hybrid master's programs in artificial intelligence. Fully online master's programs are ranked separately.
Updated
Southern Methodist University, Stanford University, and Northwestern University lead our ranking of the best on-campus master's in artificial intelligence programs. Southern Methodist University's MS in Computer Science with AI Specialization costs an estimated $48,720 for 30 credits, and Stanford University's MS in Computer Science (Artificial Intelligence Specialization) runs about $70,000 for 45 credits. Across our top 10, published tuition totals range from $48,720 to $70,000, and programs require 27 to 45 credits where listed.
10 Best On-Campus Master's in Artificial Intelligence Programs
Rank
School
Location
1
Southern Methodist University
Dallas, TX
2
Stanford University
Stanford, CA
3
Northwestern University
Evanston, IL
4
University of California, Berkeley
Berkeley, CA
5
University of Delaware
Newark, DE
6
University of Florida
Gainesville, FL
7
Santa Clara University
Santa Clara, CA
8
George Washington University
Washington, DC
9
Tufts University
Medford, MA
10
University of California, San Diego
La Jolla, CA
The table is for quick comparison. School write-ups below cover program name, format, and tuition—always confirm on the school site. More programs to compare appear after the write-ups when we have additional schools outside this top list.
How we ranked this list
We order schools on this page using our ranking method, with more weight on affordability (30%), student outcomes (30%), curriculum (20%). Figures draw from published school tuition and U.S. Department of Education outcomes data when available. Schools cannot pay for a higher rank. About 79% of programs on this list have full scoring data. Read the full ranking methodology.
Tuition Snapshot
Among 3 programs on this page with an estimated tuition total, the median is about $50,446 and the mean is about $56,389. These are published list-price estimates—not what students usually pay after aid (net price). Confirm current rates on each school site.
AI Master's Programs: The Latest Data
This guide ranks 10 programs after scoring and keeping one listing per school. Use the tuition snapshot with curriculum fit and accreditation notes before you apply.
How To Choose a Master's in Artificial Intelligence
Use these criteria when you shortlist—then confirm details on each school’s program page.
Curriculum focus
Read the required core—not just the major title. Match electives to the role you want.
Costs
Compare published totals where available, then confirm current rates and fees on each school site.
Accreditation and fit
Prefer regionally accredited schools. Check format, any campus visits, and required courses before you start before you apply.
Career outcomes
Look for labs, projects, internships, and cert prep that map to hiring—not marketing slogans alone.
1
Southern Methodist University
Dallas, TX
MS in Computer Science with AI Specialization
Overview
Availability: Varies
Estimated tuition total: $48,720 (~$1,624/credit)
Credits: 30
Best for: CS students specializing in AI/ML within an MSCS
Accreditation: SACSCOC
NSA CAE: NSA CAE (CAE-CD)
Program summary
Southern Methodist University is based in Dallas. This is a specialization on a larger program, not a standalone AI diploma; the parent major still drives required courses and campus-visit rules. Plan on roughly 2-3 years.
MS in Computer Science (Artificial Intelligence Specialization)
Overview
Availability: Varies
Estimated tuition total: $70,000 (~$1,556/credit)
Credits: 45
Best for: CS students specializing in AI/ML within an MSCS (AI specialization)
Accreditation: WSCUC
Program summary
Start with Stanford if this ranking angle matches your goals. AI/ML sits as a concentration or track inside a broader degree—scan required vs elective AI courses so you know how deep the path actually goes. Plan on roughly 1-5 years.
Best for: Learners seeking a dedicated AI master's
Program summary
Students looking at Evanston will find Northwestern University on this list. The title reads AI/ML-first; still open the curriculum map to see how much is core AI versus borrowed CS, stats, or engineering electives. Dedicated AI master's—not an add-on to another degree.
M.Eng. in Electrical Engineering and Computer Science — Visual Computing and Computer Graphics
Overview
Availability: Varies
Estimated tuition total: $50,446
Credits: 27
Best for: Engineers applying ML/AI inside computer engineering
Program summary
UC Berkeley's program is the one profiled here. UC Berkeley's program is worth a close look; confirm delivery mode on the school’s program page. This is a broader degree, not a standalone AI program.
Best for: Students comparing this specialty on cost and delivery
NSA CAE: NSA CAE (CAE-CD)
Program summary
University of Delaware is based in Newark. The title reads AI/ML-first; still open the curriculum map to see how much is core AI versus borrowed CS, stats, or engineering electives.
Best for: Learners seeking a dedicated AI master's (Standalone AI degree)
NSA CAE: NSA CAE (CAE-R)
Program summary
Students looking at Gainesville will find University of Florida on this list. Positioned as an AI/ML program on paper; verify labs, final projects, and math required courses match the intensity you want. Dedicated AI master's—not an add-on to another degree.
Best for: Learners seeking a dedicated AI master's (Santa Clara University)
Program summary
Named as an AI or ML degree—use the course list to separate theory-heavy terms from tool-focused applied semesters. Dedicated AI master's—not an add-on to another degree.
MS in Artificial Intelligence and Machine Learning
Overview
Availability: Varies
Estimated tuition total: Confirm on school site
Credits: 30
Best for: Learners seeking a dedicated AI master's (George Washington University)
NSA CAE: NSA CAE (CAE-R)
Program summary
George Washington University anchors this ranking slot. Named as an AI or ML degree—use the course list to separate theory-heavy terms from tool-focused applied semesters. Dedicated AI master's—not an add-on to another degree.
Best for: Learners seeking a dedicated AI master's (Tufts University)
Program summary
Tufts University is based in Medford. Positioned as an AI/ML program on paper; verify labs, final projects, and math required courses match the intensity you want. Dedicated AI master's—not an add-on to another degree.
Best for: Data professionals adding an AI/ML concentration
Program summary
University of California, San Diego sits in La Jolla. The title reads AI/ML-first; still open the curriculum map to see how much is core AI versus borrowed CS, stats, or engineering electives. ML/AI sits inside an engineering master's—not a standalone AI degree.
These schools also offer AI master's programs. They are not numbered in the ranking above—either they sat outside the top list, or we do not yet have a defensible tuition estimate to score them fairly on cost. Confirm current tuition and admissions on each school site.
FAQ: on-campus master's in artificial intelligence
What is the best on-campus master's in artificial intelligence?
Campus and hybrid programs from Southern Methodist University, Stanford University, and Northwestern University appear near the top of this Best Overall ranking. Confirm required courses before you start and research labs on each school site.
Online vs. campus AI master's?
Use this page for campus and hybrid lists. See our online AI master's ranking for remote options, and Most Affordable online AI master's when published total cost is the main filter.
Is an MS in AI the same as a master's in AI and machine learning?
Mostly, yes. Schools title similar degrees an MS in Artificial Intelligence, a Master of AI, or an MS in AI and Machine Learning. Compare the required courses rather than the title; a machine learning name usually means more statistics and model-building courses.
Is there a master's degree in AI engineering?
Yes. Carnegie Mellon, Auburn and Cal State Chico offer an MS in Artificial Intelligence Engineering, and Dartmouth, UCLA and the University of Maryland offer a Master of Engineering in artificial intelligence. Engineering-titled programs usually put more weight on building and deploying AI systems than on research.
Can you get a master's in generative AI?
A few schools offer one. The CUNY School of Professional Studies has an online Master of Science in Generative AI, and UNC Greensboro offers a generative AI for business concentration in its information technology and management master's. Most AI master's programs teach generative models inside deep learning and natural language processing courses.
What careers follow an AI master's?
Graduates often move into ML engineering, applied research, data science, and AI product roles. Final-project and internship access matter as much as the school name alone.
How does AIDegrees rank these programs?
We order schools on this page using our ranking method, with more weight on affordability (30%), student outcomes (30%), curriculum (20%). Figures draw from published school tuition and U.S. Department of Education outcomes data when available. Schools cannot pay for a higher rank. About 79% of programs on this list have full scoring data. Full scoring detail is on our methodology page.
